THE USE OF LABORATORY-BASED X-RAY COMPUTED TOMOGRAPHY FOR THE DIAGNOSTICS OF X-RAY REFRACTIVE OPTICS
- Mr. Anton NARIKOVICH
- Mr. Anton NARIKOVICH (Imanuel Kant Baltic Federal University)
A promising direction of development of modern X-ray optics is an optical system, based on the compound refractive lenses (CRLs). Main applications of CRLs are microfocusing and X-ray microscopy. In order to improve a technology of X-ray optics manufacturing it is urgent to develop an effective approach of precise nondestructive CRL metrology. At this work, we report the assessment of the efficiency of non-destructive inspection – a high-resolution x-ray computed tomography (HRXCT). This technique allows to realize non-destructive testing irregularities, the presence of voids, inclusions in lenses material and at the same time to analyze the shape and geometric parameters: the coaxiality, the distance between the refracting surfaces and shape of refractive surfaces. HRXCT was performed using the X-ray inspection system YXLON designed for generating high-quality X-ray images with the 1 µm resolution. We present the CT imaging results of lenses made of high-purity aluminum with the parabola apex radii of 50 µm. Comparing the obtained images with specified requirements of the geometrical characteristics of the lenses, the quality of the refractive surface and internal size of defects allows us to estimate the lens manufacturing quality.