Multifunctional X-ray lithography station at VEPP-3

5 Jul 2016, 15:00
1h
2nd and 3rd floors (Budker INP)

2nd and 3rd floors

Budker INP

Board: 088
Poster SR technological application and X-ray apparatus Poster Session

Speaker

Dr Boris Goldenberg (Budker INP SB RAS)

Description

The multifunctional station “LIGA” at synchrotron radiation source VEPP-3 is part of shared-usage "Siberian Center for Synchrotron and Terahertz Radiation" infrastructure. The apparatus used for X-ray lithography are usable for samples with size in range from 1 to 10 cm and resist layers thickness in range 1 $\mu$m to 7 mm. The development of processing methods and equipment of station is kept on. Present article deal with the capabilities of station “LIGA” and samples of produced microstructures.

Primary author

Dr Boris Goldenberg (Budker INP SB RAS)

Co-authors

Aleksey Lemzyakov (BINP SB RAS) Dr Valery Pindyurin (Budker Institute of Nuclear Physics) Mr Vladimir Nazmov (Budker Institute of Nuclear Physics)

Presentation Materials

There are no materials yet.