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Contribution Poster

Budker INP - 2nd and 3rd floors
SR technological application and X-ray apparatus

Multifunctional X-ray lithography station at VEPP-3


  • Dr. Boris GOLDENBERG

Primary authors



The multifunctional station “LIGA” at synchrotron radiation source VEPP-3 is part of shared-usage "Siberian Center for Synchrotron and Terahertz Radiation" infrastructure. The apparatus used for X-ray lithography are usable for samples with size in range from 1 to 10 cm and resist layers thickness in range 1 $mu$m to 7 mm. The development of processing methods and equipment of station is kept on. Present article deal with the capabilities of station “LIGA” and samples of produced microstructures.