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SUMMARY:Manufacturing of high resolution X-ray masks for LIGA technology i
 n SSTRC
DTSTART;VALUE=DATE-TIME:20160707T080000Z
DTEND;VALUE=DATE-TIME:20160707T082000Z
DTSTAMP;VALUE=DATE-TIME:20260610T152357Z
UID:indico-contribution-1218@indico.inp.nsk.su
DESCRIPTION:Speakers: Aleksey Lemzyakov (BINP SB RAS)\nOne of main problem
 s in deep X-ray lithography (DXRL) is X-ray masks fabrication. \nThe prima
 ry way to get high-resolution X-ray masks is to use soft X-ray lithography
  with intermediate X-ray mask. The soft X-ray lithography is performed at 
 “LIGA” station of VEPP-3 synchrotron radiation (SR) source in Siberian
  Synchrotron and Terahertz Radiation Centre (SSTRC). \nIn addition\, the t
 echnique of fabrication of intermediate X-ray mask based on titanium membr
 ane is developed.\n\nhttps://indico.inp.nsk.su/event/3/contributions/1218/
LOCATION:Budker INP Conference Hall
URL:https://indico.inp.nsk.su/event/3/contributions/1218/
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