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SUMMARY:Multifunctional X-ray lithography station at VEPP-3
DTSTART;VALUE=DATE-TIME:20160705T090000Z
DTEND;VALUE=DATE-TIME:20160705T100000Z
DTSTAMP;VALUE=DATE-TIME:20260310T093549Z
UID:indico-contribution-1319@indico.inp.nsk.su
DESCRIPTION:Speakers: Boris Goldenberg (Budker INP SB RAS)\nThe multifunct
 ional station “LIGA” at synchrotron radiation source VEPP-3 is part of
  shared-usage "Siberian Center for Synchrotron and Terahertz Radiation" in
 frastructure. The apparatus used for X-ray lithography are usable for samp
 les with size in range from 1 to 10 cm and resist layers thickness in rang
 e 1 $\\mu$m to 7 mm. The development of processing methods and equipment o
 f station is kept on. Present article deal with the capabilities of statio
 n “LIGA” and samples of produced microstructures.\n\nhttps://indico.in
 p.nsk.su/event/3/contributions/1319/
LOCATION:Budker INP 2nd and 3rd floors
URL:https://indico.inp.nsk.su/event/3/contributions/1319/
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