Speaker
Mr
Eugene Kuzmin
(Budker Institute of Nuclear Physics SB RAS)
Description
Helicon plasma source was developed as a prototype for application in linear plasma devises for plasma material interaction. Using Nagoya-type-III antenna hydrogen plasma is produced at 13.56 MHz frequency and with rf power up to 5 kW inside a quartz discharge chamber of 108 mm outer diameter and 400 mm axial length. Five coils installed outside the discharge chamber produce the magnetic field with two maxima at the ends of the chamber. Efficiency of plasma production and density distribution are very sensitive to geometry and magnetic field strength. In this paper, radial distribution of the plasma density and electron temperature as a function of the rf power, magnetic field geometry and strength, and gas pressure are presented and discussed.
Primary authors
Mr
Eugene Kuzmin
(Budker Institute of Nuclear Physics SB RAS)
Dr
Igor Shikhovtsev
(Budker Institute of Nuclear Physics SB RAS)
Co-authors
Dr
Alexander Ivanov
(Budker Institute of Nuclear Physics SB RAS)
Dr
Arkady Kreter
(FZ Juelich, Germany)
Prof.
Bernhard Unterberg
(FZ Juelich, Germany)
Mrs
Elfrida Bambutsa
(Budker Institute of Nuclear Physics SB RAS)
Dr
Igor Kotelnikov
(Budker Institute of Nuclear Physics SB RAS)
Mr
Renat Voskoboynikov
(Budker Institute of Nuclear Physics SB RAS)
Mr
Vadim Karelin
(Budker Institute of Nuclear Physics SB RAS)
Mr
Valeriy Mishagin
(Budker Institute of Nuclear Physics SB RAS)
Dr
Vladimir Davydenko
(Budker Institute of Nuclear Physics SB RAS)
