Speaker
Mr
Aleksandr Gentselev
(Budker INP, Novosibirsk, Russia)
Description
We consider the peculiar features of the LIGA-technology methods elaborated in the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and applied to producing quasi-optical subterahertz filters and focusing elements based on high-aspect self-bearing microstructures of the pseudo-metallic type. The essence of the method consists in deep X-ray lithographic patterning of an organic glass (PMMA) substrate followed by covering its entire surface with a thin layer of metal (Ag or Al). The results of manufacturing the inductive microstructures with geometry of honeycomb arrays, including high-pass filters with the cut-off frequency of 0.28 THz and focusing elements operating at 0.65 THz, are presented. The details of spectral characterization of the developed structures using a BWO-spectroscopy technique are discussed. Good agreement between the results of measurements and numerical simulations is demonstrated.
Primary author
Mr
Aleksandr Gentselev
(Budker INP, Novosibirsk, Russia)
Co-authors
Dr
Boris Goldenberg
(Budker INP SB RAS)
Mr
Evgenii Lonshakov
(Federal State Scientific Institution Institute of Automation and Electrometry Siberian Branch of the Russian Academy of Sciences)
Mr
Sergei Baev
(Federal State Scientific Institution Institute of Automation and Electrometry Siberian Branch of the Russian Academy of Sciences)
Mr
Sergei Kuznetsov
(Novosibirsk State University)
