Speaker
Peng Chen
(State Key Laboratory of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology)
Description
Faraday shield (FS), a thin-wall metal structure with slits, is used in inductive coupled plasma (ICP) sources to protect the ceramic tube from the plasma erosion and eliminate capacitive coupling. Through the slit, electromagnetic energy is coupled into the driver to excite and sustain plasma, hence FS is an important component of ICP source. Material and structure, which has significant effect on the distribution of electromagnetic field inside the driver and temperature distribution on FS, is a critical issue for FS.
In this contribution, influence of Faraday shield of various materials and structures on electromagnetic and thermal performance is discussed. FS made of copper, aluminum, molybdenum and stainless steel, as well as FS of different geometry, different size and different number of silts, are investigated. Electromagnetic field, RF power loss and temperature distribution of different FS is compared according to numerical simulations of a 3D actual source. This work can be used as a reference for the design of Faraday shield.
Primary author
Peng Chen
(State Key Laboratory of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology)
Co-authors
Mr
Chen Zuo
(Huazhong University of Science and Technology)
Prof.
Dezhi Chen
(Huazhong University of Science and Technology)
Mr
Dong Li
(Huazhong University of Science and Technology)
Mr
Guangjiu Lei
(Southwestern Institute of Physics, Chengdu, China)
Mr
Peng Zhao
(Huazhong University of Science and Technology)
