Speaker
Dr
Boris Goldenberg
(Budker INP SB RAS)
Description
The multifunctional station “LIGA” at synchrotron radiation source VEPP-3 is part of shared-usage "Siberian Center for Synchrotron and Terahertz Radiation" infrastructure. The apparatus used for X-ray lithography are usable for samples with size in range from 1 to 10 cm and resist layers thickness in range 1 $\mu$m to 7 mm. The development of processing methods and equipment of station is kept on. Present article deal with the capabilities of station “LIGA” and samples of produced microstructures.
Primary author
Dr
Boris Goldenberg
(Budker INP SB RAS)
Co-authors
Aleksey Lemzyakov
(BINP SB RAS)
Dr
Valery Pindyurin
(Budker Institute of Nuclear Physics)
Mr
Vladimir Nazmov
(Budker Institute of Nuclear Physics)
