New manufacturing method of a stamp for fabrication biochips
- Mr. Aleksandr GENTSELEV
- Mr. Aleksandr GENTSELEV (Budker INP, Novosibirsk, Russia)
A new manufacturing method of a stamp or a mold is described. They can be used to mold biochips of various plastics. A typical sequence of operations in LIGA technology is as follows: the formation of a thick resistive mask by deep x-ray lithography, the creation of a stamp (or mold) by galvanoplasty and the manufacture of plastic products using a stamp (or mold). This report describes a different sequence of operations: the formation of a thick resistive mask by deep photolithography on the working surface of blank of stamp (or mold), creating a relief of stamp by ion-beam reactive etching through a resistive mask, stamping (or casting) of plastic products, using the resulting stamp (or mold).