Method of fabricating LIGA masks of a tungsten foil
- Mr. Aleksandr GENTSELEV
- Mr. Aleksandr GENTSELEV (Budker INP, Novosibirsk, Russia)
The design and fabrication method for self-supporting mesh structures, used as high-contrast LIGA-masks in x-ray lithography of the wavelength range λ ≈ 0,5÷3 Å, are described. The LIGA-masks are produced by through-thickness patterning a solid tungsten foil fixed on a supporting ring using reactive ion-beam etching through a resistive mask of a corresponding topology. The LIGA-masks of this type are intended for manufacturing afterwards thick planar metal microstructures playing a role of quasi-optical filters in the terahertz range of the electromagnetic spectrum.